JPH02101598U - - Google Patents

Info

Publication number
JPH02101598U
JPH02101598U JP762889U JP762889U JPH02101598U JP H02101598 U JPH02101598 U JP H02101598U JP 762889 U JP762889 U JP 762889U JP 762889 U JP762889 U JP 762889U JP H02101598 U JPH02101598 U JP H02101598U
Authority
JP
Japan
Prior art keywords
conductive metal
laminated material
laminated
highly conductive
metal foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP762889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP762889U priority Critical patent/JPH02101598U/ja
Publication of JPH02101598U publication Critical patent/JPH02101598U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
JP762889U 1989-01-27 1989-01-27 Pending JPH02101598U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP762889U JPH02101598U (en]) 1989-01-27 1989-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP762889U JPH02101598U (en]) 1989-01-27 1989-01-27

Publications (1)

Publication Number Publication Date
JPH02101598U true JPH02101598U (en]) 1990-08-13

Family

ID=31212799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP762889U Pending JPH02101598U (en]) 1989-01-27 1989-01-27

Country Status (1)

Country Link
JP (1) JPH02101598U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020148796A1 (ja) * 2019-01-15 2020-07-23 株式会社日立ハイテク 電磁界遮蔽板、その製造方法、電磁界遮蔽構造、および半導体製造環境

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020148796A1 (ja) * 2019-01-15 2020-07-23 株式会社日立ハイテク 電磁界遮蔽板、その製造方法、電磁界遮蔽構造、および半導体製造環境
KR20210072092A (ko) * 2019-01-15 2021-06-16 주식회사 히타치하이테크 전자계 차폐판, 그 제조 방법, 전자계 차폐 구조 및 반도체 제조 환경
JPWO2020148796A1 (ja) * 2019-01-15 2021-10-14 株式会社日立ハイテク 電磁界遮蔽板、その製造方法、電磁界遮蔽構造、および半導体製造環境
US20220007556A1 (en) 2019-01-15 2022-01-06 Hitachi High-Tech Corporation Electromagnetic Field Shielding Plate, Method for Manufacturing Same, Electromagnetic Field Shielding Structure, and Semiconductor Manufacturing Environment
US11690208B2 (en) 2019-01-15 2023-06-27 Hitachi High-Tech Corporation Electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment

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